ヤナセ タカシ   Yanase Takashi
  柳瀨 隆
   所属   東邦大学  理学部 化学科
   職種   講師
論文種別 原著
言語種別 英語
査読の有無 査読あり
表題 A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage
掲載誌名 正式名:MEASUREMENT
ISSNコード:0263-2241/1873-412X
出版社 ELSEVIER SCI LTD
巻・号・頁 102,pp.244-248
著者・共著者 Toshihiro Shimada,Takuya Miura,Wei Xie,Takashi Yanase,Taro Nagahama
発行年月 2017/05
概要 We report an accurate and easy-to operate instrument for the temperature control of an electrically floated sample using a thermocouple in direct contact with it. The signal was transmitted via 2.45 GHz WiFi. We measured and analyzed the discrepancy between the thermocouple and a radiation thermometer for the plasma CVD of carbon nanomaterials under sample bias. A successful protection method from abnormal discharge in the plasma is also provided. (C) 2017 Elsevier Ltd. All rights reserved.
DOI 10.1016/j.measurement.2017.02.012
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