ヤナセ　タカシ   Yanase Takashi   柳瀨　隆    所属   東邦大学  理学部 化学科    職種   講師
論文種別	原著
言語種別	英語
査読の有無	査読あり
表題	Fabrication of Piezoelectric Polyurea Films by Alternating Deposition
掲載誌名	正式名：JAPANESE JOURNAL OF APPLIED PHYSICS ISSNコード：0021-4922
出版社	JAPAN SOC APPLIED PHYSICS
巻・号・頁	51(4)
著者・共著者	Takashi Yanase,Tetsuya Hasegawa,Taro Nagahama,Toshihiro Shimada
発行年月	2012/04
概要	We demonstrate that polyurea films can be prepared by alternating deposition with automated deposition control involving quartz crystal microbalance monitoring and optical source heating. The thickness of the films was linearly controlled by changing the repetition time of deposition, and the stoichiometry obtained was much higher than +/- 5%. The surface roughness of a 600-nm-thick film was 0.5 nm, which ensures the nm thickness control of the deposited polymers. The piezoelectricity of the films was confirmed by directly measuring the current transient induced by mechanical stress and by measuring the capacitance change induced by electric field. (C) 2012 The Japan Society of Applied Physics
DOI	10.1143/JJAP.51.041603
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