ヤナセ タカシ
Yanase Takashi
柳瀨 隆 所属 東邦大学 理学部 化学科 職種 講師 |
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論文種別 | 原著 |
言語種別 | 英語 |
査読の有無 | 査読あり |
表題 | A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage |
掲載誌名 | 正式名:MEASUREMENT ISSNコード:0263-2241/1873-412X |
出版社 | ELSEVIER SCI LTD |
巻・号・頁 | 102,pp.244-248 |
著者・共著者 | Toshihiro Shimada,Takuya Miura,Wei Xie,Takashi Yanase,Taro Nagahama |
発行年月 | 2017/05 |
概要 | We report an accurate and easy-to operate instrument for the temperature control of an electrically floated sample using a thermocouple in direct contact with it. The signal was transmitted via 2.45 GHz WiFi. We measured and analyzed the discrepancy between the thermocouple and a radiation thermometer for the plasma CVD of carbon nanomaterials under sample bias. A successful protection method from abnormal discharge in the plasma is also provided. (C) 2017 Elsevier Ltd. All rights reserved. |
DOI | 10.1016/j.measurement.2017.02.012 |
PermalinkURL | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013278147&origin=inward |